Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07a
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- Pages.248-251
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- 2002
The analysis of dependence on the gas number density in $SF_{6}$ -Ar mixtures
$SF_{6}$ -Ar혼합가스에서의 압력 의존도 해석
Abstract
We measured the electron drift velocity, W, in 0.5%
Keywords
- Electron drift velocity;
- Gas number density;
- Electron transport coefficient;
- $SF_{6}$ molecular gas;
- Two-term approximation of the Boltzmann equation