Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07a
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- Pages.58-61
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- 2002
Electrical Properties of SBT Thin Films after Etching in Cl$_2$ /Ar Inductively Coupled Plasma
Ar/Cl$_2$ 유도결합플라츠마 식각 후 SBT 박막의 전기적 특성
Abstract
SBT thin films were etched at different content of Cl