Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2002.05a
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- Pages.234-237
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- 2002
Fabrication of Heating Actuator Using Cobalt Silicided Thin Films
코발트실리사이드 박막을 이용한 발열 엑츄에이터의 제작
Abstract
The cobalt silicide was formed OH POly-Si/SiO
Keywords