전력전자학회:학술대회논문집 (Proceedings of the KIPE Conference)
- 전력전자학회 2002년도 전력전자학술대회 논문집
- /
- Pages.245-248
- /
- 2002
리모트 플라즈마용 전원 개발
The development of RPS (Remote Plasma Source)
- Kim Soo-Seok (Seoul National Univ. of Technology) ;
-
Won Chung-Yuen
(Sungkyunkwan Univ.)
;
- Choi Dae-Kyu (New Power Plasma co.) ;
-
Choi Sang-Don
(New Power Plasma co.)
- 발행 : 2002.07.01
초록
In this paper, the development of the RF power supply for Remote Plasma System is discussed. 7kW, 400kHz Remote Plasma Generator is designed and tested. The main power stage is used for the HB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of Remote Plasma Generator are verified by simulation and experimental results.