Design and Characteristic Analysis of Vaccum Pump Using Moving Magnet type Linear Oscillatory Actuator

가동 영구자석형 리니어 진동 액츄에이터를 이용한 진공 펌프의 설계 및 특성해석

  • Published : 2002.07.10


This paper deals with the design of vaccum pump using moving magnet type linear oscillaory actuator based on the design procedure and the characteristic analysis. To improve the starting characteristic, the optimum spring constant is detected and redesigned. The parameter was calculated by Finite Element Method(FEM). In order to dynamic characteristic analysis, Time difference method with voltage and kinetic equation is used. The propritey of the improved model is verified through the experimental.