Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2002.07b
- /
- Pages.577-579
- /
- 2002
Design of VCM(Voice Coil Motor) for Nanoindenter
나노인덴터용 보이스코일 모터 설계
Abstract
Propose of this paper is VCM (voice coil motor) design for application of Nanoindenter, which enable control of extremely small force and displacement. This paper present the VCM shape to produce a very small force by the difference of flux density of lower part from higher one. In wide range of current. VCM produces linear driving force and operate on regular thrust having maximum displacement(100um) was practiced.
Keywords