Visualization of Micro-Scale Plasma Generated in a Semiconductor Bridge (SCB)

반도체브리지로부터 발생되는 마이크로 플라스마 가시화

Plasma ignition method has been applied in various fields particularly to the rocket propulsion, pyrotechnics, explosives, and to the automotive air-bag system. Ignition method for those applications should be safe and also operate reliably in hostile environments such as; electromagnetic noise, drift voltage, electrostatic background and so on. In the present study, a semiconductor bridge (SCB) plasma ignition device was fabricated and its plasma characteristics including the propagation speed of the plasma, plasma size, and plasma temperature were investigated with the aid of the visualization of micro scale plasma $(i.e.,\;\leq\;350\;{\mu}m)$, which generated from a Micro-Electro-Mechanical poly-silicon semiconductor bridge (SCB).