Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.07a
- /
- Pages.95-95
- /
- 2001
The electrical and optical properties of high sheet resistance ITO films deposited by double erosion MSS
- Son, Young-Ho (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Jung, Myoung-Hyo (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Baek, Min (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Kim, Eun-Do (R&D Center, Alpha-Plus Co., Ltd. Uiduk University) ;
- Yoon, Jong-Man (R&D Center, Alpha-Plus Co., Ltd. Uiduk University)
- Published : 2001.07.05
Abstract
Keywords