Enhancement of photoluminescence and electrical properties of Ga-doped ZnO thin film grown on ${\alpha}$-$Al_2O_3$(0001) single crystal substrate by RF magnetron sputtering through rapid thermal annealing

  • Cho, Jung (School of Materials Science and Engineering, Yonsei University) ;
  • Nah, Jong-Bum (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Oh, Min-Seok (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Yoon, Ki-Hyun (School of Materials Science and Engineering, Yonsei University) ;
  • Jung, Hyung-Jin (Thin Film Technology Research Center, Korea Institute of Science and Technology) ;
  • Choi, Won-Kook (Thin Film Technology Research Center, Korea Institute of Science and Technology)
  • 발행 : 2001.07.05