Deposition of $ZrO_2$ thin films using RF magnetron sputtering and characterization of their physical properties on different $O_2$ concentrations

• Shin, Y.S. (Department of Chemistry, Sungkyunkwan University) ;
• Jeong, S.H. (Department of Chemistry, Sungkyunkwan University) ;
• Bae, I.S. (Department of Chemistry, Kookmin University) ;
• Kwak, H.T. (Department of Chemistry, Kookmin University) ;
• Lee, J.W. (Department of Chemistry, Sungkyunkwan University) ;
• Lee, S.B. (Department of Chemistry, Sungkyunkwan University) ;
• Boo, J.H. (Department of Chemistry, Sungkyunkwan University)

• Published : 2001.07.05

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