Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.101-101
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- 2001
Synchrotron X-ray scattering study on oxidation of epitaxial AIN films on Sapphire(0001), Si(001), Si(111) substrates
- Kang, H.C. (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
- Seo, S.H. (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
- Kim, J.W. (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology) ;
- Noh, D.Y. (Department of Materials Science and Engineering, Kwangju Institute of Science and Technology)
- Published : 2001.02.22
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