한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 창립10주년 제20회 학술발표회
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- Pages.83-83
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- 2001
The transient Si surface sputtering under low energy oxygen bombardment studied by in-situ MEIS
- Lee, Hyung-Ik (Nano Surface Group, Korea Research Institute of Standards and Science) ;
- Ha, Yong-Ho (Nano Surface Group, Korea Research Institute of Standards and Science) ;
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Moon, Dae-Won
(Nano Surface Group, Korea Research Institute of Standards and Science)
- 발행 : 2001.02.22