The transient Si surface sputtering under low energy oxygen bombardment studied by in-situ MEIS

  • Lee, Hyung-Ik (Nano Surface Group, Korea Research Institute of Standards and Science) ;
  • Ha, Yong-Ho (Nano Surface Group, Korea Research Institute of Standards and Science) ;
  • Moon, Dae-Won (Nano Surface Group, Korea Research Institute of Standards and Science)
  • Published : 2001.02.22