한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 창립10주년 제20회 학술발표회
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- Pages.43-44
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- 2001
Formation kinetics of Si clusters in silane HF discharges and their growth control
- Watanabe, Yukio (Graduate School of Information Science and Electrical Engineering, Kyushu University)
- 발행 : 2001.02.22