한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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- Pages.46-49
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- 2001
폴리백 두께가 전기적 특성에 미치는 영향
Influence of Electrical Properties due to the Poly Back Thickness
- 발행 : 2001.05.11
초록
To estimate the influence of electrical properties due to the poly back seal(PBS). we were investigated defect density in surface by deposition thickness and breakdown voltage in specimens. Deposition thickness of specimen is prepared from 7,000[