Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11b
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- Pages.554-557
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- 2001
Thermal treatment effects of sputtered ITO(glass)
Sputtered ITO(glass)의 열처리 효과
- Published : 2001.11.08
Abstract
Indium Tin Oxide(ITO) thin films have been fabricated by the dc magnetron sputtering technique with a target of a mixture
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