Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11b
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- Pages.278-280
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- 2001
Superconducting Characteristics of Bi Thin Film by Co-Deposition
동시 스퍼터 법에 의한 Bi 박막의 초전도 특성
- Lee, Hee-Kab ;
- Park, Yong-Pil ;
- Lee, Joon-Ung (KIEEME)
- Published : 2001.11.08
Abstract
BSCCO thin films have been fabricated by co-deposition at an ultralow growth rate using ion beam sputtering(IBS) method. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. MgO(100) was used as a substrate. In order to appreciate stable existing region of Bi 2212 phase with temperature and ozone pressure, the substrate temperature was varied between 655 and