Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11b
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- Pages.247-250
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- 2001
The study of SiON thin film for optical properties.
SiON 박막의 광학적 특성에 대한 연구
Abstract
We studied optical properties of SiON thin-film in the applications of optical waveguide. SiON thin-film was grown in
Keywords
- SiON;
- FTIR(fourier transform infrared);
- AES(Auger electron spectroscopy);
- refractive index;
- PECVD(plasma enhanced chemical vapor deposition);
- OES(optical emission spectroscopy)