한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

2항근사 볼츠만 방정식을 이용한 Ne분자가스의 전자수송계수의 해석

The study of electron transport coefficients in pure Ne by 2-term approximation of the Boltzmann equation

  • 전병훈 (중부대학교 컴퓨터응용설계학과) ;
  • 강명희 (중부대학교 컴퓨터응용설계학과) ;
  • 김송강 (중부대학교 정보통신공학과)
  • 발행 : 2001.05.11
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초록

The electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient $ND_L$ and $D_L/{\mu}$, in pure Ne were calculated over the wide E/N range from 0.01 to 300 Td at 1 Torr by two-term approximation of the Boltzmann equation for determination of electron collision cross sections set and for quantitative characteristic analysis of Ne molecular gas.

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