Reaction and Contact Resistance of Interfaces between Al, Ti/Al, TiN/Al and 4H-SiC

• Shin, J.Y. (Department Materials Science and Engineering, Chonnam National University) ;
• Han, S.Y. (Department of Materials Science and Engineering, Pohang University Science and Technology) ;
• Lee, J.L. (Department of Materials Science and Engineering, Pohang University Science and Technology) ;
• Lee, B.T. (Department Materials Science and Engineering, Chonnam National University)

• Published : 2001.11.01

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