Displacement measurement sensor using astigmatic confocal technology

Confocal scanning microscopy (CSM) has been reported as an excellent method using the optical probe in scanning probe microscopy (SPM). Transmission or reflection confocal scanning microscopy (TCSM, RCSM) has been used in the three-dimensional reconstruction of specimen or the non-destructive measurement in vivo. The axial movement of the primary focal point having the information of specimen gives a good measurement performance with the great sensitivity. Application of the confocal theory and astigmatism to displacement measurement sensor uses the aperture as the pinhole or slit after collecting lens relating to confocal response in non-contact measurement; and astigmatic lens using four-segments detector as short-range sensor, long-range one combining the grating and rotary one hating the rotary directional grating. The aperture type can play an ...