제어로봇시스템학회:학술대회논문집
- 2001.10a
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- Pages.111.2-111
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- 2001
Fine Gap Control System Design Using Pneumatics servo System
Abstract
The research focuses on controlling a gap to measure the surface defect in semi-conductor fabrication device. The measurement is available accompanying a near field image gap control. In this article, a pneumatic servo system is adopted for the near field gap control. The advantage of the pneumatic servo system is on the preventing the possibility of contacting the device to the wapper surface, fence arising fatal damage. Furthermore, the air from the pneumatic system blows the some particle on the wapper during controlling. The target gap is less than 20
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