Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2001.11a
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- Pages.26-27
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- 2001
Study on the impact wear property TiN thin film with Ti/TiN/Ti buffer layer/TiN structure
Ti/TiN/Ti buffer layer/TiN 구조를 갖는 TiN 박막의 충격마모특성에 관한 연구
Abstract
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