Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2001.06a
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- Pages.56-57
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- 2001
Control of electron temperature and ion ratios in inductively coupled plasma using grid bias voltage.
그리드 전압을 이용한 유도결합 플라즈마에서 전자 온도 및 이온 비율 제어
- Bai, K.H. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Hong, J.I. (Samsung electronics) ;
- Ryu, S.J. (Department of Physics, Korea Advanced Institute of Science and Technology) ;
- Chang, H.Y. (Department of Physics, Korea Advanced Institute of Science and Technology)
- Published : 2001.06.01
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