대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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- Pages.21-24
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- 2001
금속 덩어리 증착 및 금속 나노와이어에 관한 원자단위 이론 연구
Atomistic Study of Metal Cluster Deposition and Nanowires
초록
We studied aluminum cluster deposition using molecular dynamics simulation. We investigated the variations of the cluster momentum and the impulse force during collisions, and found that the close-packed cluster impact has some of properties of the single particle collision and the linear chain collisions. We also simulated the series of energetic cluster deposition with energy Per atom. When energy Per atom in cluster has some eV rather than very low, the intermixing occurred easily in growth film and we can obtain a good film without subsequent annealing process.
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