Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2001.06a
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- Pages.327-333
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- 2001
마이크로파 플라즈마 CVD법에 의해 작성된 DLC 박막 진공속에서의 거동과 증착조건의 영향
Abstract
DLC films due to their extreme properties have attracted a lot of attention. In this study, the films were prepared on High Speed Steel (SKH2) by microwave plasma assisted CVD method using CH4. Every friction test under the normal load 2,5N and sliding velocity of 20,25mm/s in high vacuum (5
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