Proceedings of the Korean Institute of Intelligent Systems Conference (한국지능시스템학회:학술대회논문집)
- 2001.12a
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- Pages.87-90
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- 2001
Realization of an estimation algorithm for wafer size grasped by Robot End-Effector
로봇 End-Effector에 의해 파지되는 웨이퍼의 사이즈 추정 알고리즘 구현
Abstract
This paper is concerned with the estimation of a wafer part in grasping system. The estimation of a wafer size in grasping system is very important because a wafer must be placed in accurate position. The accurate information of a wafer size should be forward to Robot in order to place a wafer in accurate position. So in this paper, we decide the size of a wafer with Fuzzy Logic and consider the possibility of this method by simulation.