Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2001.07a
- /
- Pages.142-145
- /
- 2001
Study on Metal-Organic Interface Modified by Ion-Assisted Reaction
- Cho, J. S. (Thin Film Technology and Research Center, Korea Institute of Science and Technology) ;
- Koh, S. K. (Thin Film Technology and Research Center, Korea Institute of Science and Technology/Plasma and Ion Beam Co. Ltd, Shinnae Technotown) ;
- Sun, Y. B. (Graduate School of Industrial Tech. and Information, Kyonggi Univ.)
- Published : 2001.07.01
Abstract
Keywords