한국마이크로전자및패키징학회:학술대회논문집 (Proceedings of the International Microelectronics And Packaging Society Conference)
- 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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- Pages.222-225
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- 2001
광 저장장치용 마이크로 미러 엑츄에이터
Micro-Mirror Actuator for Optical Disk Drives
초록
Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology and it's characteristics investigated. Also, electrode structure for reducing squeeze effect was discussed.
키워드