Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.11a
- /
- Pages.176-176
- /
- 2001
Characteristic of LiPON thin film electrolyte depnding on growth condition grown by RF magnetron sputter
RF 마그네트론 스퍼터의 성장조건에 따른 LiPON 박막전해질의 특성
Abstract
Keywords