Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.11a
- /
- Pages.166-166
- /
- 2001
Effect of rapid thermal annealing on GaN capped with $Si_3N_4$ layer
$Si_3N_4$ 막으로 보호된 GaN의 급속 열처리 효과
- Sungchan Cho (Department of Materials Science and Engineering) ;
- Dongjin Byun (Department of Materials Science and Engineering) ;
- Koh, Eui-Kwan (Seoul Branch, Korea Basic Science Institute) ;
- Changhee Hong (Chonbuk National University)
- Published : 2001.11.01
Abstract
Keywords