Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.11a
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- Pages.151-151
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- 2001
Direct bonding of $Si∥SiO_2/Si_3N_4∥Si$ wafers using a furnace
전기로를 이용한 $Si∥SiO_2/Si_3N_4∥Si$ 기판쌍의 직접접합
Abstract
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