Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.11a
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- Pages.145-145
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- 2001
Deposition of $La_2O_3$ thin film using DLI-MOCVD and evaluation of Precursors
DLI-MOCVD를 이용한 $La_2O_3$ 박막의 증착과 전구체 평가
Abstract
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