Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.05a
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- Pages.108-108
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- 2001
Low temperature deposition of $Pb(Zr_xTi_{1-x})O_3$ thin films by LDS-injection metal-organic chemical vapor deposition
액체수송 유기금속 화학증착법 (LDS-MOCVD)에 의한 $Pb(Zr_xTi_{1-x})O_3$ 박막의 저온 ($450^{\circ}C$ -$500^{\circ}C$ ) 증착 및 특성분석
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