한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- Pages.1036-1038
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- 2001
사파이어 기판의 방향에 따른 ZnO 박막의 결정화 거동
Sapphire orientation dependence of the crystallization of ZnO thin films
초록
The sapphire orientation dependence of the crystallization of ZnO thin films has been studied using real-time synchrotron x-ray scattering. The amorphous ZnO thin films with a 2400-