The study of Ag etching effect by adding compound on the lead frame process

Lead frame 공정 중 화합물에 따른 Ag 에칭효과

  • 이경수 (충북대학교 공업화학과) ;
  • 박수길 (충북대학교 공업화학과)
  • Published : 2001.07.01

Abstract

This study describes a selective Ag etching solution for use with pattern on the surface of copper. This etching solution uses potassium iodide and potassium sulfate as the ligand that coordinates to the metal ions and ferricyanide as the oxidant. The etching rate was depended on the concentration of co-ligands and time. But the etching rate wasn't depended on the pH(2∼6), and oxidant(K$_3$Fe(CN)$\_$6/). Complete etching of silver can be achieved rapidly within 90sec for 4.46${\mu}$m thick metal films when aqueous solutions containing K$_3$Fe(CN)$\_$6/, K$_2$S$_2$O$\_$8/ and KI was used. This etching solution was characteristic of anisotropic etching.

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