Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.07a
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- Pages.768-771
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- 2001
Development of a Non-contacting Capacitive Sensor for Measurement of ${\mu}{\textrm}{m}$ -order Displacements
마이크로미터 변위 측정을 위한 비접촉식 전기용량 센서 개발
Abstract
Non-contacting capacitive sensor, based on principle of the cross capacitor, for measuring of
Keywords
- non-contacting sensor;
- capacitive sensor;
- cross capacitor;
- 4-electrodes;
- sapphire plate;
- ground connection