한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
- /
- Pages.290-294
- /
- 2001
$ZnO/TiO_2$ 박막 제작과 유전율 특성
Electric Permittivity Properties and $ZnO/TiO_2$ Thin Film Fabrication
초록
In this study, ZnO is evaporated to be coated on n-type Si wafer substrate. Refractive coefficient of thin film that is evaporating TiO