한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
- /
- Pages.267-270
- /
- 2001
스마트 파워 IC를 위한 향상된 전기특성의 소규모 횡형 트랜치 IGBT
A Small Scaling Lateral Trench IGBT with Improved Electrical Characteristics for Smart Power IC
초록
A new small scaling Lateral Trench Insulated Gate Bipolar Transistor (SSLTIGBT) was proposed to improve the characteristics of the device. The entire electrode of the LTIGBT was replaced with a trench-type electrode. The LTIGBT was designed so that the width of device was no more than 10