한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- Pages.131-134
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- 2001
열 CVD에 의한 탄소나노튜브 성장 및 구조의 온도의존성
Temperature dependence on the growth and structure of carbon nanotubes by thermal chemical vapor deposition
Abstract
Vertically aligned carbon nanotubes are grown on iron-deposited silicon oxide substrates by thermal chemical vapor deposition of acetylene gas at the temperature range 750∼950