한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- Pages.37-40
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- 2001
고속 애벌린치 포토타이모드 제작을 위한 확산 공정의 신경망 모델링
Diffusion Process Modeling for High-speed Avalanche Photodiodes using Neural Networks
초록
This paper presents the modeling methodology of Zinc diffusion process applied for high-speed avalanche photodiode fabrication using neural networks. Three process factors (sealing pressure, amount of Zn