Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2001.07c
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- Pages.1896-1898
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- 2001
New Offset-compensation Technique for Capacitive MEMS-Sensor
정전형 MEMS 검출기의 새로운 Offset 보상 방법
- Min, Dong-Ki (MEMS Lab., Samsung Advanced Institute of Technology) ;
- Jeon, Jong-Up (MEMS Lab., Samsung Advanced Institute of Technology)
- Published : 2001.07.18
Abstract
An offset problem caused by the static parasitic capacitors is analyzed and then some techniques to reduce their effect on the capacitive position sensor are presented. Also new offset compensation technique is proposed that by adjusting the magnitudes of the modulating signals independently, the charge imbalance between electrodes caused by the parasitic capacitors is eliminated without sensor gain variation. Simulation results are given to validate the proposed compensation technique.
Keywords