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Proceedings of the Korean Ceranic Society Conference
(한국세라믹학회:학술대회논문집)
2000.10a
/
Pages.193.1-193
/
2000
The Korean Ceramic Society (한국세라믹학회)
The Synthesis of A Suitable Single Precursor for AlN Thin Films.
AlN 박막제조를 위한 단일전구체 합성
An, Chang-Gyu
;
Gyeong, Je-Hong
;
Jo, Seong-Hun
;
Han, Seong-Hwan
;
Choe, Seung-Cheol
안창규
(아주대학교 재료공학과) ;
경제홍
(삼성전기(주)) ;
조성훈
(KIST) ;
한성환
(KIST) ;
최승철
(아주대학교 재료공학과)
Published : 2000.10.20
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