Effect of Pt Top Electrode on Hydrogen Forming in Ferroelectric Capacitors

  • Choi, Eun-Suck (Department of Materials Engineering, Chungnam National University) ;
  • Jeon, Young-Ah (Department of Materials Engineering, Chungnam National University) ;
  • Yoon, Soon-Gil (Department of Materials Engineering, Chungnam National University)
  • Published : 2000.10.20