Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2000.10a
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- Pages.100.1-100
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- 2000
The deposition and characterization of 3C-SiC using Hexamethyldisilane(HMDS) by LPCVD
Hexamethyldisilane(HMDS)을 이용한 3C-SiC의 증착 및 특성평가
- Published : 2000.10.20
Abstract
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