Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2000.04a
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- Pages.129.2-129.2
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- 2000
Characteristics of Ir, Ru as diffusion barrier of stacked capacitor for high density non-volatile memory
FRAM 고집적 메모리를 위한 stack형 capacitor에서의 Ir,Ru의 diffusion barrier 특성
Abstract
Keywords