Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2000.04a
- /
- Pages.127.1-127.1
- /
- 2000
Gettering Behaviors of Oxidation Induced Stacking Faults in Silicon-on-Insulator structure obtained by Wafer-Direct-Bonding
직접 접합법으로 제조한 SOI 구조에서의 산화 적층 결함의 응집거동
Abstract
Keywords