Deposition of MgO Thin Films by Electrostatic Spray Pyrolysis(ESP) method and Application to AC-PDP

정전기 분무 열분해법에 의한 MgO 박막 증착과 AC-PDP로의 용용에 대한 연구

  • Published : 2000.04.22

Abstract

MgO thin films were deposited using $Mg(tmhd)_2$ as a precursor dissolved in a solvent by electrostatic spray pyrolysis. When a pure tetra hydro furan was used as a solvent, a large number of particles appeared on the MgO thin film surface due to homogeneous nucleation. However, by adding 1-butyl alcohol or 1-octyl alcohol to THF, homogeneous nucleation was restricted and the number density of the large particles was also drastically reduced. X-ray diffraction analysis showed that the MgO films had a (100) preferred orientation regardless of the type of solvents used. Characterization using Fourier Transformed-Infrared and spectroscopic photometer revealed that the crystallized MgO thin films on the glass substrate had a high optical transmittance (> 85 %) in the visible range. Discharge characteristics of MgO thin films deposited by ESP method on an alternating-current plasma display panel were compared with a MgO thin film prepared by reactive radio-frequency planar magnetron sputtering.

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