한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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- Pages.152-156
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- 2000
The Influence of Bi-Sticking Coefficient in Bi-2212 Thin Film
- Lee, Hee-Kab (Department of Electrical & Electronic Eng., Dongshin University) ;
- Park, Yong-Pil (Department of Electrical & Electronic Eng., Dongshin University) ;
- Lee, Joon-Ung (KIEEME)
- 발행 : 2000.04.28
초록
Bi-thin films are fabricated by an ion beam sputtering, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element exhibits a characteristic temperature dependence : almost a constant value of 0.49 below