Analysis on Phase-Change Based Micro-actuator

상변화를 이용한 Micro-actuator에 대한 해석

This paper presents a mathematical model and simulation of the micro-actuator based on thermally induced liquid-vapor phase-change in a partially-filled closed cavity. The volume expansion by liquid-vapor Phase change can generate considerable forces and displacement $({\sim}50{\mu}m)$ required for commercial use. For optimum operation involving many cycles within the closed chamber, active(thermoelectric) heating and cooling is used. The optimization of the system is conducted according to the parameters such as input power and response time. The optimized performance of micro-actuator is reasonable compared to other actuators.